Sputtering target

Details

The specification parameters are as follows:

SpecificationParticle sizeActive aluminumTap densityMoisture
(μm)(%)(g/cm³)(%)
FLQT043±7≥98≥1.6≤0.1%
FLQT129±3≥98≥1.6≤0.1%
FLQT224±3≥98≥1.6≤0.1%
FLQT313±2≥98≥1.5≤0.1%
FLQT46±1.5≥98≥1.4≤0.1%
FLQT52±1≥97≥1.4≤0.1

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